Summary:

What have been done in MEMS Systems?

• MEMS Sensors:
  - Analog and digital pressure sensors
  - Attitude sensors
  - Temperature
  - Shear stress-thermal type
  - MEMS sensors on a flexible polyimide sheet
• Data Module
  - Model on-board data module
  - Sensor fusion system database established in SBRT
• Data Transfer:
  - RF wireless
  - Optical fiber

Some MEMS devices have developed
to a level for tunnel uses

More MEMS devices are under
consideration for aerospace uses

Publications

1. Kahng et al, “MEMS Sensor System Development at NASA Langley Research Center for Wind Tunnel Applications,” (AIAA Reno:2002-0257) Reno, NV, 2002